WAT-226 high power wafer prober system adopts a closed cavity form and is mainly used in power semiconductor wafer level testing such as SiC, GaN and Si IGBT. The probe station integrates moving components, heating components, cooling components, prober station, and wafer chucks in a closed cavity to build a safe and stable wafer level testing environ_x0002_ment. The prober station meets special testing requirements under extreme conditions such as high temperature, low temperature, high voltage, and high current. It also protects the devices from physical damage and contamination, including oxidation, condensation, frost formation, and electrical arc breakdown.