The real-time height probing function is optional
Significantly improves coupling speed
Adds automatic FA angle adjustment to enhance FA calibration efficiency
Supports quick switching between instruments with the same functionality
Add sensors to monitor the wafer adsorption status (compatible with 2 to 12 inches)
Upgrade to achieve higher positioning accuracy and repeat positioning accuracy throughout the entire stroke
Configure temperature sensors to continuously monitor the temperature changes of the Stage
Upgrade the magnification and resolution of the top vision, and support one-click magnification switching
Upgrade the auxiliary vision to clearly observe the relative height between the optical fiber/probe and the wafer
Supports custom height sampling points, with full-wafer height scanning completed in under 5 minutes
Features a new architecture software with separated Prober and Tester; Tester supports asynchronous data processing for faster testing