The design of the Inline wafer stage needs to comprehensively consider many aspects such as flatness, stability, material selection, thermal management, electromagnetic compatibility, vacuum compatibility, transmission mechanism, cleaning and maintenance, sensor integration, automation and integration, as well as safety and reliability, so as to ensure its efficient and stable operation and meet the requirements of semiconductor manufacturing.
〇 Utilizing robotic arms for wafer transfer to minimize manual operational errors and contamination from rubber gloves on the wafers
〇 Employing ceramic trays to ensure thermal stability and physical inertness of the materials
〇 Equipped with testing capabilities such as OO/OE/EE/RF
〇 Flexible configuration of test items and ranges, with mature testing solutions available for one-click import
〇 Customizable product database with automatic report generation
〇 Capable of integrating with MES systems
〇 Unmanned operation with remote controllability
〇 Interface with Crane Tracks and Protocols
Architectural Diagram of the Overhead Hoist Transport (OHT) and Inspection Equipment Interface System
〇 High-Precision Hardware Docking: Via automatic positioning mechanisms and customized pick-and-place interfaces
〇 Intelligent Software Collaboration: Integrates MCS system with real-time monitoring platform
〇 Triple Safety Protection: Combines anti-collision warning, overtime protection, and emergency power supply mechanisms to ensure stable system operation and rapid fault recovery